The Influence of using Al, boron permeation and ZrO2 as additives on the Effective Life of Hot Borax Salt Bath in a TD Process
碩士 === 國立臺灣大學 === 機械工程學研究所 === 88 === As well known among hard films coating methods, Toyota Diffusion (TD) process has its unique advantages of simple instrumentation, easy operation and lower cost as compared with Chemical Vapor Deposition (CVD) and Physical Vapor Deposition (PVD) processes. Howev...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
2000
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Online Access: | http://ndltd.ncl.edu.tw/handle/49094500552941516389 |