The Development of the Scheduling Mechanism of a Semiconductor Cluster Tool
碩士 === 國立臺灣大學 === 機械工程學研究所 === 88 === The thesis is proposed for developing the scheduling mechanism of a cluster tool. The scheduling mechanism consists of several components, such as a historical data comparator, scheduling maker, scheduling simulator, and scheduling selector. They are used respec...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2000
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| Online Access: | http://ndltd.ncl.edu.tw/handle/92950273995402862230 |