The Modeling and Control of the Cluster Tool in Semiconductor Fabrication
碩士 === 國立臺灣大學 === 機械工程學研究所 === 88 === A single wafer processing IC fabrication with flexible and distributed configuration is getting more important. The cluster tool is such an IC fabrication equipment. It consists of the cassette module, transport module, and process module. In this thesis, the mo...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2000
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/38267278781839006814 |