Modeling, Scheduling, and Prediction in Wafer Fabrication Systems Using Queueing Petri Net and Genetic Algorithm
碩士 === 國立臺灣大學 === 資訊工程學研究所 === 88 === Wafer fabrication is one of the most capital-intensive manufacturing process in the world, which requires a huge investment in plant and equipment. Besides, it is also the most complicated manufacturing process nowadays. Its complexity is the results of equipmen...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2000
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| Online Access: | http://ndltd.ncl.edu.tw/handle/75005870880646071350 |