Growth and optoelectronic properties of SiCN nanostructures
碩士 === 國立臺灣大學 === 物理學研究所 === 88 === In this thesis, an innovative two-stage growth strategy will be presented for the growth of SiCN nanorods and nanowires. In the first stage, an electron cyclotron resonance chemical vapor deposition (ECR-CVD) method was employed to deposit nano-crystall...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2000
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| Online Access: | http://ndltd.ncl.edu.tw/handle/60801162703961536078 |