Growth and Optoelectronic Properties of SiCN Nanorods

碩士 === 國立臺灣大學 === 物理學研究所 === 88 === We report here a novel two stage method for the growth of one-dimensional single crystal nanorods, which are comprised of Si, C, and N. The first stage involves high-density nucleation on Si substrate by using electron cyclotron resonance plasma-enhance...

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Bibliographic Details
Main Authors: Kuo, Po-Fen, 郭博棻
Other Authors: Chen, Yang-Fang
Format: Others
Language:zh-TW
Published: 2003
Online Access:http://ndltd.ncl.edu.tw/handle/74131759733476557883