鈦鎳基形狀記憶合金薄膜濺鍍於矽晶圓之研究
碩士 === 國立臺灣大學 === 材料科學與工程學研究所 === 88 === In the study, TiNi SMA thin films have been prepared by RF sputtering on SiNx-deposited (100) silicon wafer. SiNx was deposited by PECVD. Interfacial reactions between TiNi and SiNx were investigated after different annealing temperatures. After 500℃×30min an...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2000
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| Online Access: | http://ndltd.ncl.edu.tw/handle/12899214976245571447 |