Fabrication and Characterization of MOSFET Pressure Sensor
碩士 === 國立海洋大學 === 電機工程學系 === 88 === The conventional pressure sensor consists of four resistors in the form of a Wheatstone bridge. A number of strain-sensitive resistors are made by diffused impurities or ion implanted impurities into silicon wafers. The resistance is fixed after the dif...
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| Format: | Others |
| Language: | en_US |
| Published: |
2000
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| Online Access: | http://ndltd.ncl.edu.tw/handle/32891632217515284551 |