Qualitative measurement of the ICP plasma sheath driven by high voltage pulse
碩士 === 國立清華大學 === 物理學系 === 88 === Using the "two-dimensional nonlocal heating theory",which was developped by N. S. Yoon, to design the planar-type coil of the planar-type ICP(inductively coupled plasma) system. And we successfully set a planar-type ICP system. We ob...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2000
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| Online Access: | http://ndltd.ncl.edu.tw/handle/65104683441667993668 |