Interfacial Reactions of Titanium and Cobalt Metal Thin Films on Silicon
博士 === 國立清華大學 === 材料科學工程學系 === 88 ===
Main Authors: | Shu-Ming Chang, 張恕銘 |
---|---|
Other Authors: | Lih-Juann Chen |
Format: | Others |
Language: | zh-TW |
Published: |
2000
|
Online Access: | http://ndltd.ncl.edu.tw/handle/07714922172874804748 |
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