Interfacial Reactions of Titanium and Cobalt Metal Thin Films on Silicon

博士 === 國立清華大學 === 材料科學工程學系 === 88 ===

Bibliographic Details
Main Authors: Shu-Ming Chang, 張恕銘
Other Authors: Lih-Juann Chen
Format: Others
Language:zh-TW
Published: 2000
Online Access:http://ndltd.ncl.edu.tw/handle/07714922172874804748