Interfacial Reactions of Titanium and Cobalt Metal Thin Films on Silicon

博士 === 國立清華大學 === 材料科學工程學系 === 88 ===

Bibliographic Details
Main Authors:	Shu-Ming Chang, 張恕銘
Other Authors:	Lih-Juann Chen
Format:	Others
Language:	zh-TW
Published:	2000
Online Access:	http://ndltd.ncl.edu.tw/handle/07714922172874804748

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spelling	ndltd-TW-088NTHU01591032016-07-08T04:23:16Z http://ndltd.ncl.edu.tw/handle/07714922172874804748 Interfacial Reactions of Titanium and Cobalt Metal Thin Films on Silicon 鈦、鈷金屬薄膜與矽晶之界面反應研究 Shu-Ming Chang 張恕銘博士國立清華大學材料科學工程學系 88 Lih-Juann Chen 陳力俊 2000 學位論文 ; thesis 0 zh-TW
collection	NDLTD
language	zh-TW
format	Others
sources	NDLTD
description	博士 === 國立清華大學 === 材料科學工程學系 === 88 ===
author2	Lih-Juann Chen
author_facet	Lih-Juann Chen Shu-Ming Chang 張恕銘
author	Shu-Ming Chang 張恕銘
spellingShingle	Shu-Ming Chang 張恕銘 Interfacial Reactions of Titanium and Cobalt Metal Thin Films on Silicon
author_sort	Shu-Ming Chang
title	Interfacial Reactions of Titanium and Cobalt Metal Thin Films on Silicon
title_short	Interfacial Reactions of Titanium and Cobalt Metal Thin Films on Silicon
title_full	Interfacial Reactions of Titanium and Cobalt Metal Thin Films on Silicon
title_fullStr	Interfacial Reactions of Titanium and Cobalt Metal Thin Films on Silicon
title_full_unstemmed	Interfacial Reactions of Titanium and Cobalt Metal Thin Films on Silicon
title_sort	interfacial reactions of titanium and cobalt metal thin films on silicon
publishDate	2000
url	http://ndltd.ncl.edu.tw/handle/07714922172874804748
work_keys_str_mv	AT shumingchang interfacialreactionsoftitaniumandcobaltmetalthinfilmsonsilicon AT zhāngshùmíng interfacialreactionsoftitaniumandcobaltmetalthinfilmsonsilicon AT shumingchang tàigǔjīnshǔbáomóyǔxìjīngzhījièmiànfǎnyīngyánjiū AT zhāngshùmíng tàigǔjīnshǔbáomóyǔxìjīngzhījièmiànfǎnyīngyánjiū
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Interfacial Reactions of Titanium and Cobalt Metal Thin Films on Silicon

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