A Study of Stress Behavior of Copper FilmsPrepared by Sputter and CVD Process in Cu/Diffusion Barrier/Si Three Layers Structer
碩士 === 國立清華大學 === 材料科學工程學系 === 88 ===
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2000
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/92195473176060926012 |
| Summary: | 碩士 === 國立清華大學 === 材料科學工程學系 === 88 ===
|
|---|