The effect of sputtering parameters and the third elements on magnetic properties of FePt thin films.
碩士 === 國立清華大學 === 材料科學工程學系 === 88 === Abstract FeXPt1-X(x=46, 53, 55, 81) thin films were deposited by dc magnetron sputtering on Si(100) and CrMo-layer seeded glass substrates. The sputtering was carried out at high substrate temperatures to help direct formation of ordered phase γ1. Bor...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2000
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| Online Access: | http://ndltd.ncl.edu.tw/handle/45843020199064536309 |