The Electric Characteristics of Thin Oxynitride Films Prepared by Liquid Phase Deposition and Quality Improvement by Biasing during the Growth
碩士 === 國立中山大學 === 電機工程學系研究所 === 88 === ASTRACT Using an aqueous solution of ammonia hydroxide aqua, hydrosilicofluoric acid and boric acid, an oxynitride film can be deposited. The deposition rate and refractive index increase with the mole concentration of ammonia hydroxide aqua. However, the...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2000
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| Online Access: | http://ndltd.ncl.edu.tw/handle/95202723341951796748 |