The study of AlN thin film grown on bottom electrode under room temperature condition
碩士 === 國立中山大學 === 材料科學研究所 === 88 === In this study, highly C-axis oriented AlN thin films stacked upon Al bottom electrode on Si and Glass substrate are deposited with Reactive RF magnetron sputtering Technique. Three different sputtering systems were utilized to evaluate the optimized growth parame...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2000
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| Online Access: | http://ndltd.ncl.edu.tw/handle/24657564588686655933 |