氫氣對二氧化碳雷射誘發化學氣相沈積法成長碳質膜之影響
碩士 === 國立中央大學 === 光電科學研究所 === 88 === The purpose of the research was to deposit the Diamond-like carbon films（DLC）with hydrogen .The DLC were deposited on Si（100）P－type wafer substrate by a laser induced chemical vapor deposition system with H2 and C2H4 as the source gases. The deposited films were...
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| Format: | Others |
| Language: | zh-TW |
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2000
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| Online Access: | http://ndltd.ncl.edu.tw/handle/30280537593526562747 |
| Summary: | 碩士 === 國立中央大學 === 光電科學研究所 === 88 === The purpose of the research was to deposit the Diamond-like carbon films（DLC）with hydrogen .The DLC were deposited on Si（100）P－type wafer substrate by a laser induced chemical vapor deposition system with H2 and C2H4 as the source gases. The deposited films were examined by SEM、Dektak、FTIR and Raman spectroscopy to evaluate their structures and properties. From the experimental results, The effect of hydrogen flow in the films, it is believed that the hydrogen can prevent the nucleation of graphite phase, and stabilize of sp3 bonding. We also found a diamond structure on the films.
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