氫氣對二氧化碳雷射誘發化學氣相沈積法成長碳質膜之影響
碩士 === 國立中央大學 === 光電科學研究所 === 88 === The purpose of the research was to deposit the Diamond-like carbon films（DLC）with hydrogen .The DLC were deposited on Si（100）P－type wafer substrate by a laser induced chemical vapor deposition system with H2 and C2H4 as the source gases. The deposited films were...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2000
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| Online Access: | http://ndltd.ncl.edu.tw/handle/30280537593526562747 |