Technology Development of Microbolometer IRFPA Detectors
博士 === 國立交通大學 === 光電工程所 === 88 === In this thesis, fabrication and characterization of CMOS-process-compatible microbolometer IRFPAs detectors are explored. These monolithic IRFPAs made of metal and semiconductor films and having thermally isolated structures are fabricated by combining IC process w...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2000
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/70658672064499045597 |