Fault Detection and Diagnosis of the Plasma Machine using the Modeling Approach
碩士 === 國立交通大學 === 電機與控制工程系 === 88 === In this thesis,we present a fault detection and diagnosis technique for Lam 490 plasma etcher in semiconductor IC fabrication. First, we propose a new dynamic model for the chamber pressure of Lam 490 in terms of gas law of physi...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2000
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| Online Access: | http://ndltd.ncl.edu.tw/handle/25866983064737594656 |