Design and Fabrication of a Silicon Microphone
碩士 === 國立交通大學 === 電機與控制工程系 === 88 === Microelectromechanical systems contain micromechanical structures, microsensors, microactuators, and signal processing components. It is predicted to be the star of future industry. This research utilized the integration of bulk and surface micromachining techni...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2000
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| Online Access: | http://ndltd.ncl.edu.tw/handle/64103928346490553898 |