| Summary: | 碩士 === 國立交通大學 === 電機與控制工程系 === 88 === In the thesis, we propose a framework of real-time simulator and controller for rapid thermal processing (RTP) system in semiconductor manufacturing. We use two independent computers to design simulator and controller, and develop real-time software of simulator and controller using real-time OS (real-time Linux).
For the simulator, we establish a mathematical model of the RTP system using view factor, and arrange the lamp configuration to achieve uniform temperature on the wafer. The control system consists of a least square feedforward controller, output feedback proportional plus integral (PI) controller and a learning control system. The learning control system can repeatedly improve the control commend to reduce the temperature tracking error.
The control and feedback signals are connected via two A/D cards and two D/A cards in order to simulate the signals in a real RTP machine. As a result, the controller developed can be adopted easily to a real machine for a rapid prototyping design.
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