Real-time simulator and control system for rapid thermal processing modules
碩士 === 國立交通大學 === 電機與控制工程系 === 88 === In the thesis, we propose a framework of real-time simulator and controller for rapid thermal processing (RTP) system in semiconductor manufacturing. We use two independent computers to design simulator and controller, and develop real-time software of simulator...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2000
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| Online Access: | http://ndltd.ncl.edu.tw/handle/82970993047361947025 |