Chemical Vapor Deposition of Niobium Carbonitride Thin Films from Alkylimidoniobium Complex

Chemical Vapor Deposition of Niobium Carbonitride Thin Films from Alkylimidoniobium Complex

碩士 === 國立交通大學 === 應用化學系 === 88 === The imido complexes, Nb(NR)(NEtMe)3 (R = nPr, iPr, tBu), were successfully synthesized from Nb(NR)Py2Cl3 with LiNEtMe. These complexes were characterized by NMR spectroscopy, and mass spectroscopy. Nb(NtBu)(NEtMe)3, tertbutylimidotriethylmethy...

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Bibliographic Details
Main Authors:	Chia-Chen Wu, 吳珈臻
Other Authors:	Hsin-Tien Chiu
Format:	Others
Language:	zh-TW
Published:	2000
Online Access:	http://ndltd.ncl.edu.tw/handle/17513467692526874786

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