Chemical Vapor Deposition of Niobium Carbonitride Thin Films from Alkylimidoniobium Complex
碩士 === 國立交通大學 === 應用化學系 === 88 === The imido complexes, Nb(NR)(NEtMe)3 (R = nPr, iPr, tBu), were successfully synthesized from Nb(NR)Py2Cl3 with LiNEtMe. These complexes were characterized by NMR spectroscopy, and mass spectroscopy. Nb(NtBu)(NEtMe)3, tertbutylimidotriethylmethy...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2000
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| Online Access: | http://ndltd.ncl.edu.tw/handle/17513467692526874786 |