Studies of Cd1-xFexS Thin Films Prepared by R.F. Sputtering
碩士 === 國立交通大學 === 電子物理系 === 88 === The Cd1-xFexS films with various Fe concentration were deposited by radio frequency sputtering ( RF sputtering ) in this thesis. We controlled the deposition conditions: the substrate temperature, the period of in-situ post annealing and the different ki...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2000
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| Online Access: | http://ndltd.ncl.edu.tw/handle/18675013947217241919 |