On Fabrication of Two-dimensional Micro Vibratory Gyroscopes by Quasi-LIGA-like Process
碩士 === 國立成功大學 === 機械工程學系 === 88 === The gyro is getting more important applications in many fields. A traditional gyro has some drawbacks, for example, they are bulky in volume and wear of bearings is not avoidable. However, the vibratory micro gyro can sense changes of angular velocity based on con...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2000
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| Online Access: | http://ndltd.ncl.edu.tw/handle/42510877435351565670 |