Researches on Fabrication of Micro Compliant Manipulators by Using Excimer Laser

碩士 === 國立成功大學 === 機械工程學系 === 88 === The researches of using compliant material to fabricate micro components have become important technology in recent years. Compliant material with properties of forming shape and simple structure can be widely used in industrial application. In this the...

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Bibliographic Details
Main Authors: C. H. Shen, 沈鎮華
Other Authors: R. J. Chang
Format: Others
Language:zh-TW
Published: 2000
Online Access:http://ndltd.ncl.edu.tw/handle/27502133405517711574