以射頻磁控濺鍍法製備(Ba0.75Sr0.25)TiO3晶片型陶瓷電容器及其特性之探討
碩士 === 國立成功大學 === 材料科學及工程學系 === 88 === ABSTRACT In this study , both single BST and multilayer (BST/Pt)n thin films deposited onto Pt/Ti/SiO2/Si ( n-type (100) ) substrate from targets in composition of BaTiO3 and SrTiO3 powders mixed and sintered , by R.F. magnetron sputtering...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2000
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| Online Access: | http://ndltd.ncl.edu.tw/handle/41168231510140047506 |