ZnO：Al薄膜氣體感測器之研究
碩士 === 國立成功大學 === 材料科學及工程學系 === 88 === The development of gas sensors is flourishing due to the environment pollution and technological requirements. This study investigated the sensing properties to CO of the ZnO:Al films prepared by RF reactive magnetron sputtering. Comparison of the as-deposited...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2000
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| Online Access: | http://ndltd.ncl.edu.tw/handle/25283598643566785289 |