The Research of the Heat and Mass Transfer for CVD in vertical Reactor
碩士 === 國立成功大學 === 工程科學系 === 88 === A numerical software, FIDAP, using finite element method is applied to investigate fluid movement, heat and mass transfer in reactors with vertical chemical vapor deposition. The reactor entrance and substrate possess low and high temperature respectivel...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2000
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| Online Access: | http://ndltd.ncl.edu.tw/handle/05000805239770983653 |
| Summary: | 碩士 === 國立成功大學 === 工程科學系 === 88 === A numerical software, FIDAP, using finite element method is applied to investigate fluid movement, heat and mass transfer in reactors with vertical chemical vapor deposition. The reactor entrance and substrate possess low and high temperature respectively. Due to the huge temperature gradient between the reactor entrance and substrate, an informative buoyancy force effect is caused. Buoyancy force effect cooperating with inertia force and viscous force makes sophisticated mixed convection.
There are many kinds of reactors with different geometry and operating situations for specific purpose. Different shapes and operating situations directly affect velocity and temperature field in reactors. The heat and mass transfer in the reactors are calculated with the numerical approach. Film deposition rate and deposition flatness rate within various reactors are further analyze.
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