The Research of the Heat and Mass Transfer for CVD in vertical Reactor
碩士 === 國立成功大學 === 工程科學系 === 88 === A numerical software, FIDAP, using finite element method is applied to investigate fluid movement, heat and mass transfer in reactors with vertical chemical vapor deposition. The reactor entrance and substrate possess low and high temperature respectivel...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2000
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| Online Access: | http://ndltd.ncl.edu.tw/handle/05000805239770983653 |