| Summary: | 碩士 === 中原大學 === 機械工程學系 === 88 === In this study, the research topics include the robot path planning and force control. It contains of the robot arm path planning and mechanism design in the vacuum, cluster tool platform, and robot path planning for obstacle avoidance in automatic application as well as the force control for a Stewart Platform Based Manipulator.
A SCARA type robot arm for wafer transport in a vacuum cluster tool platform is investigated. To maintain cleanness, the actuator system is installed outside the vacuum chamber, which transmits the power to the robot joint by use of the gear train. Suitable speed ratios of the gear train to satisfy the desired manipulation are derived. Transport efficiency and mechanism efficiency is defined relative to the wafer throughput and dimension of the robot arm and the central transport chamber. The optimal design parameters are obtained via geometric analysis to gain both the transport and mechanism efficiency.
In research ofpath planning for obstacle avoidance, according to the previously developed two methods, the neighbor search and the depth-first search, the reason to form the worse path of obstacle avoidance is discovered and a better solution is ascertained. Finally, by comparing the advantage and disadvantage of these methods, it provides the user to select an appropriate searching method.
The study on force control is to design a hybrid position/force controller of the Stewart Platform Based Manipulator by use of the dynamic model including the cutting dynamics. PI or PD is investigated. The advantage and disadvantage of using the PI or PD control law is discussed with simulation results, which will be referenced for future experiment testing.
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