Dynamic Analysis, Motion Control and Trajectory Planning of Wafer Transfer Robot
碩士 === 中原大學 === 機械工程學系 === 88 === The wafer transfer robot is an important part of the cluster-tools. This thesis will present the trajectory planning of the robot in the front-end module of the cluster-tools, analysis of the dynamics and simulation on the motion of the robot in the vacuum transfer...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2000
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| Online Access: | http://ndltd.ncl.edu.tw/handle/55710855488253102647 |