GROWTH AND ETCHING OF C60 THIN FILMS
碩士 === 中原大學 === 物理學系 === 88 === In this report, the optimum way for how to use the vertical PVD system to grow C60 thin poly-films is studied at different substrate temperatures (410℃、352℃ and 303℃) and different growth times( 1 to 36 hours). From the SEM and XRD measurements, the influence on the g...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2000
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| Online Access: | http://ndltd.ncl.edu.tw/handle/16031915793186559309 |