The study of LIGA-like technology in manufacturing refractive microlens arrays with SU-8 photoresist
碩士 === 中華大學 === 電機工程學系碩士班 === 88 === The LIGA technology in the field of micro-electro-mechanical system (MEMS), which integrates the processes of X-ray lithography, electroplating, and micromolding, uses the synchrotron radiation as lithography source. However, few can utilize this proce...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2000
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| Online Access: | http://ndltd.ncl.edu.tw/handle/41760315370229746969 |