矽晶圓電解削銳輪磨與表面性狀研究
碩士 === 中正理工學院 === 兵器系統工程研究所 === 88 === The ELID(Electrolytic In-process Dressing) allows the use of the metal bonded ,ultrafine grit wheels for the mirror surface grinding of hard and brittle materials .Investigations were conducted on metallic wheel oxidation as the anode in ELID and non...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2000
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| Online Access: | http://ndltd.ncl.edu.tw/handle/11178302898582765630 |