精密鑽石車削矽晶圓表面與次表面分析及研究
碩士 === 中正理工學院 === 兵器系統工程研究所 === 88 === Abstract Single crystal silicon is usually considered to be extremely brittle and exhibits little ductility in machining. During the indentation tests, cracks appeared around the impression at load as little as five grams and the crystallo...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2000
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| Online Access: | http://ndltd.ncl.edu.tw/handle/57674196235933855262 |