Modeling of Surface Roughness for MEMS

• Main Authors: Chih-Hsing Cheng, 鄭誌興
• Other Authors: Dau-Chung Wang
• Format: Others
• Language: zh-TW
• Published: 1999
• Online Access: http://ndltd.ncl.edu.tw/handle/59193501172498561091

碩士 === 國立雲林科技大學 === 機械工程技術研究所 === 87 === The surface to volume ratio is commonly greater in MEMS than in comparable macro-world system. It results that the surface characteristics, such as surface roughness, play a major role in the performance of MEMS devices. Therefore, the control of the surface characteristics of MEMS devices is becoming vital and necessary. Fractal dimension is a description of the complexity of the surface texture. Large fractal dimension means more surface irregularity. It is a quantified indication of the surface roughness and can be used to evaluate the selection of appropriate fabrication parameters. In this research, the surface roughness data of aluminum specimens were measured by AFM. The basic theory of fractals was investigated. An easier "mean variation method" for the calculation of fractal dimension was developed. The surfaces of several aluminum specimens were polished by an electrochemical process. Fractal dimensions of these surfaces were calculated. The most appropriate fabrication parameters were identified.