Modeling of Surface Roughness for MEMS
碩士 === 國立雲林科技大學 === 機械工程技術研究所 === 87 === The surface to volume ratio is commonly greater in MEMS than in comparable macro-world system. It results that the surface characteristics, such as surface roughness, play a major role in the performance of MEMS devices. Therefore, the control of...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
1999
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| Online Access: | http://ndltd.ncl.edu.tw/handle/59193501172498561091 |