THE FABRICATION OF SnO2 THIN FILMS ON ZNO/CORNING 7059 GLASS BY RF MAGNETRON SPUTTERING FOR HUMIDITY SENSING APPLICATIONS
碩士 === 大同工學院 === 電機工程研究所 === 87 === Zinc Oxide, which has strong piezoelectric effect and can be sputtered on a variety of substrates, is a natural choice as the piezoelectric film layer in recent years. The Corning 7059 glass substrate, whose thermal expansion coefficient is nearly equal...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
1999
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/01693605258916864979 |