Fabrication of Miniature Thermal Conductivity Detector
碩士 === 國立臺灣科技大學 === 機械工程系 === 87 === A miniature thermal conductivity detector has been designed and fabricated by silicon based micromachining. The sensor consists of four serpentine nickel thin films, which has highest temperature coefficient of resistivity than other common metal. The Ni film res...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
1999
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| Online Access: | http://ndltd.ncl.edu.tw/handle/89071373187899223269 |