System Modeling and Robust Design of Microaccelerometer Using Piezoelectric Thin Film
碩士 === 國立臺灣科技大學 === 機械工程系 === 87 === This thesis focuses on the electromechanical system modeling and robust design of microaccelerometer using piezoelectric thin film. Because of its advantages of high piezoelectric constant and temperature stability, piezoelectric thin films are very promising in...
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| Format: | Others |
| Language: | zh-TW |
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1999
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| Online Access: | http://ndltd.ncl.edu.tw/handle/06192551686190604076 |
| Summary: | 碩士 === 國立臺灣科技大學 === 機械工程系 === 87 === This thesis focuses on the electromechanical system modeling and robust design of microaccelerometer using piezoelectric thin film. Because of its advantages of high piezoelectric constant and temperature stability, piezoelectric thin films are very promising in the applications of microaccelerometers and microactuators. This research starts from the structure analysis and drives the system modeling of piezoelectric microaccelerometer. The simulation model will be used in the parameter design of microaccelerometer. Manufacturing errors result in the variations of design variables, which has significant effects on sensor accuracy. This research will apply Taguchi''s method to reduce the sensitivity of sensor response to manufacturing disturbances including variations of dimensions and material properties. This thesis also conducts a finite element analysis using ANSYS to verify the resonance frequency of the microstructure and the mechanical response of the theoretical model.
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