System Modeling and Robust Design of Microaccelerometer Using Piezoelectric Thin Film
碩士 === 國立臺灣科技大學 === 機械工程系 === 87 === This thesis focuses on the electromechanical system modeling and robust design of microaccelerometer using piezoelectric thin film. Because of its advantages of high piezoelectric constant and temperature stability, piezoelectric thin films are very promising in...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
1999
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/06192551686190604076 |