The Feasibility Study of Modular-Based IC Fabrication

• Main Authors: Chung-Rung Hung, 洪崇榮
• Other Authors: Suhua Hsieh
• Format: Others
• Language: zh-TW
• Published: 1999
• Online Access: http://ndltd.ncl.edu.tw/handle/22821041118209199842

碩士 === 國立臺灣大學 === 機械工程學研究所 === 87 === In the current semiconductor manufacturing, the long plant-construction time, the high probability of machine failures, and the long repairing time significantly increase the integrated circuit (IC) manufacturing time and cost, thus decrease the competition of Taiwan IC product. To solve these mentioned problems, the Industrial Technology Research Institute (ITRI) of Taiwan proposed a modular-based IC fabrication conceptual plant [1998]. Although ITRI illustrates several features, a modular fabrication is so far a concept only. A simulation model has not been constructed yet and, the performance and possible problems during the implementation of the modular plant are not known. This study intends to construct a modular fabrication simulation plant, analyze and evaluate the performance of the plant and, re-layout the plant and make comparison among different layouts. Simulation models for both the traditional and the modular fabrication plants are constructed on AutoMod simulation environment. By adjusting mean time between failures (MTBF) and mean time to repair (MTTR) of machines, the performance of the modular fabrication provides better performance than the traditional one when the MTBF is small enough or/and the MTTR is large enough. Different layouts, in terms of function, flow and cell, of modular fabrication plants are also constructed in this study. Simulations on these three layouts are performed and discussed. Ignoring the congestion of traffic, layouts do not affect much the performance of fabrication. A modular fabrication concept becomes concrete. In addition, simulation results provide data regarding the feasibility of the modular fabrication for semiconductor manufacturer''s consideration.