The Feasibility Study of Modular-Based IC Fabrication
碩士 === 國立臺灣大學 === 機械工程學研究所 === 87 === In the current semiconductor manufacturing, the long plant-construction time, the high probability of machine failures, and the long repairing time significantly increase the integrated circuit (IC) manufacturing time and cost, thus decrease the competition of T...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
1999
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| Online Access: | http://ndltd.ncl.edu.tw/handle/22821041118209199842 |