Petri-Net and GA Based Approach to Modeling, Scheduling, and Performance Evaluation for Wafer Fabrication
碩士 === 國立臺灣大學 === 資訊工程學研究所 === 87 === Wafer fabrication is one of the most capital-intensive manufacturing processes in the world, which requires an huge investment in plant and equipment. Also, wafer fabrication is the most complicated one found today. The complexith is as the result of equipment u...
| Main Authors: | , |
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| Format: | Others |
| Language: | en_US |
| Published: |
1999
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| Online Access: | http://ndltd.ncl.edu.tw/handle/26380441791542028562 |