Study of Interferometric Imaging Lithography and Sub-Half-Micron Grating Fabrication
碩士 === 國立臺灣大學 === 光電工程學研究所 === 87 === We demonstrated the fabrication of sub-half-micron grating for DBR laser and the study of imaging interferometric lithography (IIL) in this thesis. The sub-half-micron grating is fabricated by the exposure of holographic interference which is an econ...
| Main Authors: | , |
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| Format: | Others |
| Language: | en_US |
| Published: |
1999
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| Online Access: | http://ndltd.ncl.edu.tw/handle/48174985181274652676 |