Two-Dimensional Modeling of Nonlocal Electron Heating in Inductively Coupled Plasma Sources
碩士 === 國立清華大學 === 工程與系統科學系 === 87 === Nonlocal (collisionless) electron heating can be important in low-pressure inductively coupled rf discharges. We have developed a two-dimensional, electromagnetic, PIC-MCC code to study power deposition in an inductively coupled plasma source. Simulation results...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
1999
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| Online Access: | http://ndltd.ncl.edu.tw/handle/58594211688855980025 |