Study of IMP Ta and TaNx as diffusion barrier layer in copper metallization
碩士 === 國立清華大學 === 工程與系統科學系 === 87 ===
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
1999
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| Online Access: | http://ndltd.ncl.edu.tw/handle/70818139231678547980 |